Quartz Diffusion Furnace Tube Fused Silica Oxidation Furnance Tube

Quartz diffusion furnace tube has one end open, and the other end is closed. There is a gas intake pipe in the center of the closed end, and a flange is on the open end to increase the sealing area, therefore increase the sealing effect. It is one of the core structures of the diffusion furnace, which is used in the diffusion process of semiconductor wafer and solar cell silicon wafer.

Brand:
ATCERA
Item NO.:
AT-SY-XG001

Materials
Quartz Glass
Shapes
Tube
Applications
Semiconductor , Photovoltaic Cell Industry

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Properties of Quartz Diffusion Furnace Tube

Quartz furnace diffusion tube has good light transmittance, high temperature resistance, good corrosion resistance, excellent insulation performance.

It has excellent optical properties,light transmission efficiency is high, also with good high temperature resistance and thermal stability, corrosion resistance, good chemical stability, excellent electrical insulation properties, it plays an irreplaceable role in the production of semiconductor and photovoltaic cells.

Applications of Quartz Oxidation Furnance Tube

Quartz diffusion furnace tube is used in semiconductor wafer and solar cell silicon wafer production.

It is mainly used in the diffusion and oxidation process of semiconductor wafer and solar cell silicon wafer.

Size Chart for Quartz Oxidation Furnance Tube

We are committed to delivering prime fused quartz diffusion furnace tube tailored to your exact specifications. Our dedicated team ensures meticulous adherence to your instructions, striving to exceed customer expectations. Additionally, we offer the flexibility of customized sizes to accommodate your unique requirements.

Drawings and parameter requirements shall be provided if customized design request.

Dimention Tolerance of Quartz Diffusion Furnace Tube
Outer Diameter	Outer diameter(%)	Thickness(%)	Roundness(%)	Maximum Curvature(%)	End face Flatness(mm)	End Face Perpendicularity(mm)
200≤φ＜250	±0.5	±10	±0.5	0.3	±0.1	±0.5
φ≥250	±0.5	±10	±0.5	0.3	±0.1	±0.5

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Drawing of Quartz Oxidation Furnance Tube

Quartz Oxidation Furnance Tube
Item NO.	OD (mm)	ID (mm)	Thickness (mm)	Length (mm)	Quartz's Purity (mm)
AT-SY-XG001	55	50	2.5	1500~2000	99.99
AT-SY-XG002	90	83	3.5	1500~2000	99.99
AT-SY-XG003	200	190	5	2000~3500	99.99
AT-SY-XG004	330	314	8	2000~3500	99.99
AT-SY-XG005	430	410	10	2000~3500	99.99
AT-SY-XG006	550	520	15	2000~3500	99.99

Technical Data of Fused Quartz Materials

Density (g/cm3)	2.2
Flexture Strength (MPa)	48
Elastic Modulus (GPa)	72
Poisson's Ratio	0.14-0.17
Compressive strength (MPa)	1100
Bending strength (MPa)	67
Moh's hardness	5.5~6.5
Maximum working temperature (long-term, ℃)	1100
Maximum working temperature (short-term, ℃)	1350
Thermal conductivity (W/m*K)	1.4
Thermal expansion coefficient (/℃)	5.5*10-7
Specific resistance (Ω*cm)	7*107

*This chart illustrates the standard characteristics of the quartz materials commonly employed in the manufacturing of our quartz products and parts. Please be aware that the attributes of customized quartz products and parts may vary depending on the specific processes involved.

Usage Instructions

Quartz diffusion furnace tube cleaning precautions:

1. Hydrofluoric acid, hydrochloric acid, nitric acid or other combined acids can be used as cleaning reagents, and the concentration of acid shall be controlled within 5%. Pay attention to protection during operation to prevent skin corrosion.

2. Strictly control the pickling time to prevent excessive cleaning or insufficient cleaning of the quartz tube.

3. After pickling is completed, it should be washed with deionized water. No acid shall remain on the inner surface of the tube, so as not to affect the performance.

4. Acid-containing cleaning wastewater can not be discharged directly, it should be discharged only after treatment to meet environmental protection requirements.

Quartz Furnace Tubes for Semiconductor Diffusion

Valuable Information

Quartz Diffusion Furnace Tube Packing

Quartz diffusion furnace tubes are carefully packaged in appropriate containers to avoid any potential damage.

Customization Advantages

1. According to your application scenario, analyze the needs, choose the appropriate material and processing plan.

2. Professional team, quick response, can provide solutions and quotations within 24 hours after confirming the demand.

3. Flexible business cooperation mechanism, support at least one piece of quantity customization.

4. Quickly provide samples and test reports to confirm that the product meets your needs.

5. Provide product use and maintenance suggestions to reduce your cost of use.

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FAQ

Do you supply the materials unlisted on your website?

Although our primary focus is on advanced ceramic materials such as alumina, zirconia, silicon carbide, silicon nitride, aluminum nitride, and quartz ceramics, we are always exploring new materials and technologies. If you have a specific material requirement, please contact us, and we will do our best to fulfill your needs or find suitable partners.

Can you aid in material selection & ceramic product design?

Absolutely. Our technical team possesses profound knowledge of ceramic materials and extensive experience in product design. We are happy to provide you with material selection advice and product design support to ensure optimal performance for your products.

Do you have a minimum order value requirement?

We do not have a fixed minimum order value requirement. We always focus on meeting our customers' needs, and we strive to provide quality service and products regardless of the order size.

What services beyond ceramic products do you offer?

In addition to ceramic products, we also provide a range of additional services, including but not limited to: customized ceramic processing services based on your needs, using blanks or semi-finished blanks produced by yourself; if you are interested in outsourced ceramic packaging and metallization services, please contact us for further discussion. We are always committed to providing you with a one-stop solution to meet your various needs.

Do you offer international shipping services?

Yes, we do. No matter where you are located globally, we can ensure the safe and timely delivery of your order.

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