Silicon carbide boat bracket
Silicon carbide boat bracket
Silicon carbide boat bracket
Silicon carbide boat bracket
Silicon carbide boat bracket

Silicon Carbide Boat Bracket For Semiconductor SiC Ccarrier For Wafer Boat

The silicon carbide boat bracket is a key component in semiconductor wafer and photovoltaic cell production equipment, and it is used to carry the wafer boat (or boat bracket) containing the semiconductor wafer or solar silicon wafer into the diffusion furnace for coating treatment.

  • Brand:

    ATCERA
  • Item NO.:

    AT-THG-ZT
  • Materials

    SiC
  • Shapes

    Mechanical Parts
  • Applications

    Semiconductor , Photovoltaic Cell Industry
SiC boat bracket for semiconductor

Properties of SiC Ccarrier For Wafer Boat

 

Silicon carbide boat bracket has high temperature resistance, high bending strength, good thermal shock resistance, good thermal stability, high bearing capacity under high temperature, strong oxidation resistance, without impurity drop.

 

1. Silicon carbide boat bracket has high temperature resistance, the maximum use temperature can reach to 1600℃, it also has good thermal shock resistance, service life of more than 5 years;

 

 

2. Silicon carbide boat bracket has light weight, high strength, high bearing capacity under high temperature, it can reduce the size and weight of the loading system to meet the needs of higher output for single batch production;

 

 

3. Silicon carbide boat bracket thermal expansion coefficient is very small, similar to LPCVD coating, when applied to LPCVD, therefore it can greatly extend the maintenance and cleaning cycle.

Applications of Silicon Carbide Boat Bracket

Applications of Silicon Carbide Boat Bracket

 

Silicon carbide boat bracket is a key component in photovoltaic cell and semiconductor wafer production equipment, for carrying solar silicon wafer and semiconductor wafer in diffusion furnaces at high temperatures (1000-1300℃)

 

 

1. Photovoltaic cell manufacturing industry

 

 

 

2. Semiconductor wafer manufacturing industry

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Customized Design for Silicon Carbide Boat Bracket

We are committed to delivering optimal silicon carbide boat bracket tailored to your exact specifications. Our dedicated team ensures meticulous adherence to your instructions, striving to exceed customer expectations. Additionally, we offer the flexibility of customized sizes to accommodate your unique requirements.

 

Drawing and specification requirement shall be provided if customized design request.

 

Machining Tolerance:
1. Diameter: ±0.01mm
2. Surfance Roughness:Ra0.5
3. Cylindricity:±0.004mm
4. Concentricity:±0.003mm
5. Parallelism: ±0.002mm

 

 

 

Customized Design for Silicon Carbide Boat Bracket

 

 

Technical Data of Silicon Carbide Materials

 

Item Unit Index Data
Reaction-sintered SiC
(SiSiC)
Silicon Nitride Bonded With SiC
(NBSiC)
Sintered SiCn Without Pressure
(SSiC)
SiC Content % 85 80 99
Free  Silicon Content % 15 0 0
Max. Service Temp. 1380 1550 1600
Density g/cm3 3.02 2.72 3.1
Porosity % 0 12 0
Bending Strength 20℃ Mpa 250 160 380
1200℃ Mpa 280 180 400
Modulus of Elasticity 20℃ Gpa 330 220 420
1200℃ Gpa 300 / /
Thermal Conductivity 1200℃ W/m.k 45 15 74
Coefficient of Thermal Expansion K-1×10-6 4.5 5 4.1
Vickers Hardness HV kg/mm2 2500 2500 2800

 

*This chart illustrates the standard characteristics of the silicon carbide materials commonly employed in the manufacturing of our SiC products and parts. Please be aware that the attributes of customized silicon carbide products and parts may vary depending on the specific processes involved.

 

Usage Instructions

 
 
 
1. The silicon carbide boat bracket should be moved with the assistance of special handling tools to prevent violent collision and strong vibration;
 
 
2. Silicon carbide boat bracket should be stored in a dry, dust-free, non-corrosive gas environment to prevent moisture and erosion;
 
 
3. Before using the silicon carbide boat bracket, the appearance inspection should be carried out to check whether there are defects such as damage, deformation, cracks and so on;
 
 
4. Silicon carbide boat bracket should be regularly maintained, including cleaning, inspection and replacement of damaged boat bracket.
 

Valuable Information

 

Silicon Carbide Boat Bracket Packing

Silicon Carbide Boat Bracket Packing

 

 

Silicon carbide boat brackets are carefully packaged in appropriate containers to avoid any potential damage.

 

 

 

 

 

 

Customization Advantages
Customization Advantages

 

 

1. According to your application scenario, analyze the needs, choose the appropriate material and processing plan.

 

2. Professional team, quick response, can provide solutions and quotations within 24 hours after confirming the demand.

 

3. Flexible business cooperation mechanism, support at least one piece of quantity customization.

 

4. Quickly provide samples and test reports to confirm that the product meets your needs.

 

5. Provide product use and maintenance suggestions to reduce your cost of use.

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Although our primary focus is on advanced ceramic materials such as alumina, zirconia, silicon carbide, silicon nitride, aluminum nitride, and quartz ceramics, we are always exploring new materials and technologies. If you have a specific material requirement, please contact us, and we will do our best to fulfill your needs or find suitable partners.

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